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Creators/Authors contains: "Blesin, Terence"

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  1. ; ; ; ; ; (, 34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021))
    null (Ed.)
    ilicon Nitride integrated photonic circuits have drawn much attention owing to its ultra-low loss and large Kerr nonlinearity. However, the lack of Pockels effect makes it difficult to be modulated electro-optically, which posts a major challenge for the further development of Si3N4 circuits with advanced functions. The widely adopted thermo-optical tuning suffers from large power consumption and restricted speed (~1 kHz). In this study, microwave frequency modulation (up to 9 GHz) of Si3N4 ring resonator is achieved by exciting bulk acoustic waves piezoelectrically, which modulates the microring via stress-optical effect. The acoustic waves are confined tightly in a released SiO2 thin film which enhances the acoustic energy density and thus modulation efficiency. 
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